JPH0330259U - - Google Patents
Info
- Publication number
- JPH0330259U JPH0330259U JP8790489U JP8790489U JPH0330259U JP H0330259 U JPH0330259 U JP H0330259U JP 8790489 U JP8790489 U JP 8790489U JP 8790489 U JP8790489 U JP 8790489U JP H0330259 U JPH0330259 U JP H0330259U
- Authority
- JP
- Japan
- Prior art keywords
- outer casing
- exhausts
- inlet
- atmospheric pressure
- pressure cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000000443 aerosol Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8790489U JPH0330259U (en]) | 1989-07-26 | 1989-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8790489U JPH0330259U (en]) | 1989-07-26 | 1989-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330259U true JPH0330259U (en]) | 1991-03-25 |
Family
ID=31637543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8790489U Pending JPH0330259U (en]) | 1989-07-26 | 1989-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330259U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012256937A (ja) * | 2012-09-14 | 2012-12-27 | Taiyo Nippon Sanso Corp | 気相成長装置及び方法 |
-
1989
- 1989-07-26 JP JP8790489U patent/JPH0330259U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012256937A (ja) * | 2012-09-14 | 2012-12-27 | Taiyo Nippon Sanso Corp | 気相成長装置及び方法 |